Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source

Brunets, Ihor and Walters, Robert J. and Kovalgin, Alexey Y. and Polman, Albert and Schmitz, Jurriaan (2011) Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source. In: 219th ECS Meeting, 1-6 May 2011, Montreal, QC, Canada.

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Abstract:	Integrated circuit components have nowadays reached dimensions much smaller than the dimensions oftypical micro-optical components. This “size mismatch” is regarded as a practical concern for a variety of integrated optics applications. The application of surface plasmon polaritons (SPPs) generated at metal/dielectric interfaces provides light confinement and control at length scales below 100 nm, herewith overcoming this size mismatch [1], [2]. The SPP can propagate with an effective wavelength much smaller than the free-space wavelength of photons at the same frequency. In contemporary SPP research, plasmons are normally generated by external lasers. In a recent article [2] we have presented an electrical SPP source (shown in Fig. 1), operating at low supply voltage, and manufactured using CMOS backend compatible techniques. When a current is applied to our device, we observe emission at the location of the out-coupling grating array.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/79893
Official URL:	http://tinyurl.com/7sj4e55
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