Characterization of Green Laser Crystallized GeSi Thin Films

Rangarajan, Balaji and Brunets, Ihor and Oesterlin, Peter and Kovalgin, Alexey and Schmitz, Jurriaan (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA.

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Abstract:	Green laser crystallization of a-Ge0.85Si0.15 films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8x2 μm2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 Cambridge University Press
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/79856
Official URL:	http://dx.doi.org/10.1557/opl.2011.807
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