Characterization of Green Laser Crystallized GeSi Thin Films

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Rangarajan, Balaji and Brunets, Ihor and Oesterlin, Peter and Kovalgin, Alexey and Schmitz, Jurriaan (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA (pp. a06-04).

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Abstract:Green laser crystallization of a-Ge0.85Si0.15 films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8x2 μm2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.
Item Type:Conference or Workshop Item
Copyright:© 2011 Cambridge University Press
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/79856
Official URL:http://dx.doi.org/10.1557/opl.2011.807
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