An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance

Kovalgin, Alexey Y. and Tiggelman, Natalie and Wolters, Rob A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE Transactions on Electron Devices, 59 (2). 426-432 . ISSN 0018-9383

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Abstract:	The parasitic factors that strongly influence the measurement accuracy of cross-bridge Kelvin resistors have been extensively discussed during the last few decades. The minimum value of specific contact resistance that can be accurately extracted has been estimated. In this paper, we present an analytical model to account for the actual current flow across the contact and propose an area-correction method for a reliable extraction of specific contact resistance. The model is experimentally verified for low-resistivity (close-to-ideal) metal-to-metal contacts. The minimum contact resistance is determined by the dimensions of the two-metal stack in the area of contact and sheet resistances of the metals used.
Item Type:	Article
Copyright:	© 2012 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/79693
Official URL:	http://dx.doi.org/10.1109/TED.2011.2174365
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