Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance


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Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and Boer, M. de and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 434-437).

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Abstract:Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/79655
Official URL:http://dx.doi.org/10.1109/TRANSDUCERS.2011.5969571
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