Single chip flow sensing system with a dynamic flow range of more than 4 decades


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Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. and Groenesteijn, J. and Haneveld, J. (2011) Single chip flow sensing system with a dynamic flow range of more than 4 decades. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China.

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Abstract:We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Item Type:Conference or Workshop Item
Copyright:© 2011 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/79580
Official URL:http://dx.doi.org/10.1109/TRANSDUCERS.2011.5969158
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