Arrays of biomimetic hair flow-sensor dedicated for measuring flow patterns


Dagamseh, A.M.K. and Krijnen, G.J.M. (2011) Arrays of biomimetic hair flow-sensor dedicated for measuring flow patterns. In: International Congress on Flow Sensing in Air and Water, 17-20 July 2011, Bonn, Germany.

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Abstract:Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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