Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and Actuators A: Physical, 169 (2). pp. 308-316. ISSN 0924-4247

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Abstract:	In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.
Item Type:	Article
Copyright:	© 2011 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/79490
Official URL:	http://dx.doi.org/10.1016/j.sna.2011.02.010
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