Miniaturization of a micro coriolis mass flow sensor with lorentz actuation

Groenesteijn, J. and Lammerink, T.S.J. and Lötters, J.C. and Haneveld, J. and Wiegerink, R.J. (2011) Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In: Micromechanics and Micro systems Europe Workshop, MME 2011, June 19-22, 2011, Toensberg, Norway.

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Abstract:	In this paper we present a significant reduction in size of a micromachined Coriolis mass flow sensor without sacrificing resolution or range. The sensor has a flow range from 10 mg/h up to more than 1000 mg/h, which is equivalent to 10 ul/h to 1 ml/h water. The reduction is achieved by using a more localized magnetic field for the actuation of the sensor.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/79451
Conference URL:	http://www.mme2011.org/
Proceedings URL:	http://www.mme2011.org/MME2011_Proceedings.pdf
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