Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

Çivitci, F. and Sengo, G. and Pollnau, M. and Driessen, A. and Hoekstra, H.J.W.M. (2011) Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2011, 1-2 December 2011, Ghent, Belgium.

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Abstract:	A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/79372
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