A novel mechano-optical sensor based on read-out with a Si $_3$ N $_4$ grated waveguide

Pham, S.V. and Dijkstra, M. and Wolferen van, H.A.G.M. and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A novel mechano-optical sensor based on read-out with a Si $_3$ N $_4$ grated waveguide. In: Annual Symposium of the IEEE Photonics Benelux Chapter 2011, 1-2 December 2011, Ghent, Belgium.

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Abstract:	Microcantilever-based sensors can be used to detect molecular absorption of, for example, hydrogen gas, which causes changes in the surface stress, leading to deflection of the cantilever. Such a deflection can be determined by means of optical beam deflection, capacitance-, or piezo-resistance based readout. We have recently proposed a compact integrated mechano-optical sensor using a novel and highly sensitive integrated read-out scheme to detect small deflections of a cantilever in close proximity to a grated waveguide (GWG) structure. Here we present the integrated optical read-out of stress-induced micro-bridge deflections due to hydrogen gas absorption by a Pd receptor layer on top of the micro-bridge.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/79370
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A novel mechano-optical sensor based on read-out with a SiN grated waveguide