Low power silicon-based thermal sensors and actuators for chemical applications


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Vereshchagina, Elizaveta (2011) Low power silicon-based thermal sensors and actuators for chemical applications. thesis.

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Abstract:In the Hot Silicon project low and ultra-low-power Si-based hot surface devices have been developed, i.e. thermal sensors and actuators, for application in catalytic gas micro sensors, micro- and nano- calorimeters.
This work include several scientific and technological aspects:
• Design and fabrication of suspended membrane ultra-low-power hot-surface Si-based thermal sensors and actuators;
• Integration of the sensors and actuators into a micro flow channel, and investigation of the related microfluidic aspects, i.e. flow behavior and control, heat transport and transport of reactive species,
• Investigation of potential applications in the field of micro calorimetric sensing, e.g. studying thermallyactivated physical and chemical processes on-a-chip, i.e. detection of reaction heats, adsorption/desorption kinetics.
Item Type:Thesis
Faculty:
Science and Technology (TNW)
Research Group:
Link to this item:http://purl.utwente.nl/publications/79248
Official URL:http://dx.doi.org/10.3990/1.9789036533003
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