Fabrication of photonic components by nanoimprint technology within ePIXnet

Plachetka, U. and Kristensen, A. and Scheerlinck, S. and Huskens, J. and Koo, N. and Kurz, H. (2008) Fabrication of photonic components by nanoimprint technology within ePIXnet. Microelectronic Engineering, 85 (5-6). pp. 886-889. ISSN 0167-9317

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Abstract:	The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.
Item Type:	Article
Copyright:	© 2008 Elsevier
Faculty:	Science and Technology (TNW)
Research Group:	Molecular Nanofabrication (MNF)
Link to this item:	http://purl.utwente.nl/publications/79087
Official URL:	http://dx.doi.org/10.1016/j.mee.2008.01.013
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