Fabrication of photonic components by nanoimprint technology within ePIXnet

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Plachetka, U. and Kristensen, A. and Scheerlinck, S. and Huskens, J. and Koo, N. and Kurz, H. (2008) Fabrication of photonic components by nanoimprint technology within ePIXnet. Microelectronic Engineering, 85 (5-6). pp. 886-889. ISSN 0167-9317

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Abstract:The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.
Item Type:Article
Copyright:© 2008 Elsevier
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/79087
Official URL:http://dx.doi.org/10.1016/j.mee.2008.01.013
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