Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

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Hoang, T.H. and Tong, H.D. and Segers-Nolten, G.M.J. and Tas, N.R. and Subramaniam, V. and Elwenspoek, M.C. (2012) Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules. Journal of colloid and interface science, 367 (1). 455 - 459. ISSN 0021-9797

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Abstract:We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20 nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10 mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
Item Type:Article
Copyright:© 2011 Elsevier
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/78934
Official URL:http://dx.doi.org/10.1016/j.jcis.2011.10.001
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Metis ID: 280917