Silicon oxynitride technology for integrated optical solutions in biomedical applications


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Wörhoff, Kerstin and Ismail, Nur and Akca, B. Imran and Pollnau, Markus and Ridder, René M. de (2011) Silicon oxynitride technology for integrated optical solutions in biomedical applications. In: 13th International Conference on Transparent Optical Networks 2011, 26-30 June 2011, Stockholm, Sweden (pp. pp. 1-4).

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Abstract:Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.
Item Type:Conference or Workshop Item
Copyright:© 2011 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/78638
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