Silicon oxynitride technology for integrated optical solutions in biomedical applications

Wörhoff, Kerstin and Ismail, Nur and Akca, B. Imran and Pollnau, Markus and Ridder de, René M. (2011) Silicon oxynitride technology for integrated optical solutions in biomedical applications. In: 13th International Conference on Transparent Optical Networks 2011, 26-30 June 2011, Stockholm, Sweden.

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Abstract:	Silicon oxynitride, a dielectric material with excellent optical properties, is applied for a wide range of integrated optical devices operating at visible or NIR wavelengths. High-quality channel waveguides are reliably fabricated by plasma enhanced chemical vapor deposition and reactive ion etching following standard lithography. Based on a general, polarization-independent channel waveguide layout various arrayed waveguide gratings were designed, realized and tested for on-chip spectrometers in Raman detection and optical coherence tomography (OCT). With this approach Raman spectra of silicon and cyclohexane test samples are measured. An OCT image of a phantom sample is produced.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/78638
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