A thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]


Krijnen, Bram and Hogervorst, Richard and Dijkstra, Jan Willem and Engelen, Johan and Woldering, Léon and Brouwer, Dannis and Abelmann, Leon and Soemers, Herman (2011) A thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699

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Abstract:Accurate manipulation of small objects is becoming more and more important. Besides accurate manipulation, the demand for small manipulators is also increasing. Some examples are high-density data storage, (digital) light processing, accelerometers, rate sensors, and the use of cantilevers in atomic force microscopy. Another example where small and accurate manipulators are beneficial is inside an electron microscope, for sample as well as beam manipulation. This work presents the design, fabrication and experimental validation of a thermal displacement sensor for accurate measurement of the position of a MEMS stage. The sensor was integrated with the manipulation stage in a singlemask production process.
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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