Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2011, 5-9 June 2011, Beijing, China.

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Abstract:	We report non-degenerate parametric amplification in our biomimetic MEMS hair-based flow-sensors with improved responsivity and sharp filtering through AC-biasing. To the best of our knowledge, this is the first flow sensor with tunable filtering by non-degenerate electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies and achieving highly selective gain of up to 20 dB.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/78298
Official URL:	http://dx.doi.org/10.1109/TRANSDUCERS.2011.5969213
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