Characterization of electrical contacts for phase change memory cells


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Roy, Deepu (2011) Characterization of electrical contacts for phase change memory cells. thesis.

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Abstract:Advancements in integrated circuits demand an increasing requirement for
a faster, low-cost non-volatile memory with improved scaling potential. Phase
change memory is an important emerging memory technology qualifying these
requirements. With dimensional scaling, the contacts are scaled by F2, therefore
knowledge of the contact properties becomes even more important. This thesis
deals with the characterization of electrical contacts for phase change memory
cells. An electrical contact in this respect refers to the interfaces formed in the
memory cell, i.e. the metal electrode to phase change material (PCM) contacts
in the crystalline and in the amorphous state.
Item Type:Thesis
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/78105
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