Switchable capacitor

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2011) Switchable capacitor. Patent.

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Abstract:	A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom elecrode, a dielaectric layer deposited on at least part of sai bottum electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actiuation area in order to stabilize the down state position of the armature. The device may futhermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area of with relay actuation.
Item Type:	Patent
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/78022
Official URL:	http://worldwide.espacenet.com/publicationDetails/biblio?CC=EP&NR=1398811B1&KC=B1&FT=D&date=20110810&DB=EPODOC&locale=nl_NL
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