Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever


Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Jansen, H.V. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics Express, 19 (17). pp. 15864-15878. ISSN 1094-4087

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Abstract:The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately position them near the evanescent field of the resonator. Using electrostatic actuation, moving the cantilevers into this evanescent field, the propagation properties of the ring waveguide are modulated. We demonstrate 122 pm tuning of the resonance wavelength of the optical ring resonator (in the optical C-band) without change of the optical quality factor, on application of 9 V to a 40 µm long cantilever. This compact integrated device can be used for tuning/switching a specific wavelength, with very little energy for operation and negligible cross talk with surrounding devices
Item Type:Article
Copyright:© 2011 Optical Society of America
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/78016
Official URL:https://doi.org/10.1364/OE.19.015864
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