Micromechanically tuned ring resonator in silicon on insulator

Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and Boer de, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and Ridder de, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia.

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Abstract:	Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/77968
Conference URL:	http://www.iqec-cleopr2011.com/
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