Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide

Pham, So V. and Dijkstra, Meindert and Wolferen van, Henk A.G.M. and Pollnau, Markus and Krijnen, Gijs J.M. and Hoekstra, Hugo J.W.M. (2011) Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide. Optics Letters, 36 (15). pp. 3003-3005. ISSN 0146-9592

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Abstract:	We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.
Item Type:	Article
Copyright:	© 2011 Optical Society of America
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/77963
Official URL:	http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-15-3003
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