Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Lu, Jiwu and Kovalgin, Alexey Y. and Werf van der, Karine H.M. and Schropp, Ruud E.I. and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE Transactions on Electron Devices, 58 (5). pp. 2014-2021. ISSN 0018-9383

PDF
Restricted to UT campus only: Request a copy
801Kb

Abstract:	We present the monolithic integration of deepsubmicrometer complementary metal–oxide–semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).
Item Type:	Article
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/77759
Official URL:	http://dx.doi.org/10.1109/TED.2011.2143716
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page