Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

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Lu, Jiwu and Kovalgin, Alexey Y. and Werf, Karine H.M. van der and Schropp, Ruud E.I. and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE Transactions on Electron Devices, 58 (5). pp. 2014-2021. ISSN 0018-9383

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Abstract:We present the monolithic integration of deepsubmicrometer complementary metal–oxide–semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust”).
Item Type:Article
Copyright:© 2011 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/77759
Official URL:http://dx.doi.org/10.1109/TED.2011.2143716
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