Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements
Herfst, Roelof W. and Schmitz, Jurriaan and Scholten , Andries J. (2011) Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements. In: IEEE International Reliability Physics Symposium, IRPS 2011, 10-14 April 2011, Monterey, USA (pp. XT.6.1-XT.6.4).
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|Abstract:||Conventional on-the-fly characterization of NBTI translates measured changes in drain current to a threshold voltage shift only. In this paper, we show how to extend this method to the simultaneous determination of threshold voltage and zero-field-mobility degradation. This is achieved by using a Vector Network Analyzer for OTF characterization of gds and gm.
For the technology under study, we have found that degradation in the zero-field mobility is responsible for at most 10% of the drain current change. Effective mobility, on the other hand, does change as a direct consequence of the threshold-voltage shift.
|Item Type:||Conference or Workshop Item|
|Copyright:||© 2011 IEEE|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/77746|
|Export this item as:||BibTeX|
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