Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors

Çivitci, Fehmi and Driessen, Alfred and Hoekstra, Hugo J.W.M. (2011) Light turning mirrors for hybrid integration of optical waveguides in SiON technology and CMOS based photo-detectors. In: European Conference on Lasers and Electro-Optics, CLEO/Europe 2011, 22-26 May 2011, Munich, Germany.

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Abstract:	A new method is proposed for hybrid integration of optical waveguides and CMOS photo-detectors. Simulation results show that the coupling efficiency is 45 % including the losses induced by dielectric layers on the detectors.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 Optical Society of America
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/77684
Official URL:	http://www.opticsinfobase.org/abstract.cfm?URI=CLEO/Europe-2011-CE8_2
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