Advancements in Biomimetic Hair Flow-Sensor Arrays

Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Advancements in Biomimetic Hair Flow-Sensor Arrays. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway.

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Abstract:	In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/77683
Official URL:	http://www.mme2011.org/MME2011_Proceedings.pdf
Conference URL:	http://www.mme2011.org/
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