Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images


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Yamahata, C. and Sarajlic, E. and Stranczl, M. and Krijnen, G.J.M. and Gijs, M.A.M. (2011) Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China (pp. pp. 1697-1700).

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Abstract:We present a straightforward method for measuring
in-plane linear displacements of microelectromechanical
systems (MEMS) with subnanometer resolution. The
technique is based on Fourier transform analysis of a
video recorded with a Charge-Coupled Device (CCD)
camera attached to an optical microscope and can be used
to characterize any device featuring periodic patterns
along the direction of motion. Using a digital microscope
mounted on a vibration isolation table, a subpixel
resolution better than 1/100 pixel could be achieved,
enabling quasi-static measurements with a resolution of
0.5 nm.
Item Type:Conference or Workshop Item
Copyright:© 2011 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/77682
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