Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

Yamahata, C. and Sarajlic, E. and Stranczl, M. and Krijnen, G.J.M. and Gijs, M.A.M. (2011) Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China.

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Abstract:	We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/77682
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