Application of focused ion beam technology for photonic nanostructures


Ay, Feridun and Gadgil, Vishwas J. and Geskus, Dimitri and Aravazhi, Shanmugam and Wörhoff, Kerstin and Pollnau, Markus (2011) Application of focused ion beam technology for photonic nanostructures. In: 2011 NSTI Nanotechnology Conference & Expo - Nanotech 2011, 13-16 June 2011, Boston, Massachusetts (pp. pp. 200-203).

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Abstract:Al2O3 and KY(WO4)2 are promising materials for photonic applications with excellent optical properties and of interest for obtaining on chip resonator structures. However, there is no method available to fabricate these structures except FIB technology. We will discuss strategies to optimize the nano-structuring processes that are strongly dependent on the geometry of the desired structure. Furthermore, we will report our recent results on utilization and optimization of the focused ion beam technique for fabrication of nano-structures in integrated photonic devices on several material platforms such as amorphous Al2O3 and crystalline KY(WO4)2
Item Type:Conference or Workshop Item
Copyright:© 2011 Nano Science and Technology Institute
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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