Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity

Abdulla, S.M.C. and Kauppinen, L.J. and Ridder de, R.M. and Krijnen, G.J.M. (2011) Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China.

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Abstract:	A micro-bimorph cantilever is monolithically integrated with a photonic crystal micro-cavity based device, using surface micro-machining techniques. The integrated cantilever is equipped with self-aligned dielectric tips with respect to the holes of the photonic crystal and on electrostatic actuation, the tips move into the holes, providing electro-opto-mechanical modulation of guided waves. The device is designed to operate in the C-band of the telecommunication wavelengths and constitute a promising candidate for future integrated optical devices.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/77628
Conference URL:	http://www.transducers11-beijing.org/
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