Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity


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Abdulla, S.M.C. and Kauppinen, L.J. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China (pp. pp. 2534-2537).

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Abstract:A micro-bimorph cantilever is monolithically
integrated with a photonic crystal micro-cavity based
device, using surface micro-machining techniques. The
integrated cantilever is equipped with self-aligned
dielectric tips with respect to the holes of the photonic
crystal and on electrostatic actuation, the tips move into
the holes, providing electro-opto-mechanical modulation
of guided waves. The device is designed to operate in the
C-band of the telecommunication wavelengths and
constitute a promising candidate for future integrated
optical devices.
Item Type:Conference or Workshop Item
Copyright:© 2011 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/77628
Conference URL:http://www.transducers11-beijing.org/
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