Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever

Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder de, René M. (2011) Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany.

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Abstract:	Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring can be tuned over a 50 pm wavelength range by applying 8.5 V, without affecting its Q-factor.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 Optical Society of America
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/77572
Official URL:	http://www.opticsinfobase.org/abstract.cfm?URI=CLEO/Europe-2011-CE5_1
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