Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever


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Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder de, René M. (2011) Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany.

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Abstract:Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring can be tuned over a 50 pm wavelength range by applying 8.5 V, without affecting its Q-factor.
Item Type:Conference or Workshop Item
Copyright:© 2011 Optical Society of America
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/77572
Official URL:http://www.opticsinfobase.org/abstract.cfm?URI=CLEO/Europe-2011-CE5_1
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