A Novel Mechano-Optical Sensor based on Read-out with a Si3N4 Grated Waveguide


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Pham, S.V. and Dijkstra, M. and Wolferen, H.A.G.M. van and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A Novel Mechano-Optical Sensor based on Read-out with a Si3N4 Grated Waveguide. In: Conference on Lasers and Electro-Optics, CLEO 2011, 1-6 May 2011, Baltimore, Maryland, USA (pp. CThQ4).

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Abstract:A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.
Item Type:Conference or Workshop Item
Copyright:© 2011 Optical Society of America
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/77377
Official URL:http://www.opticsinfobase.org/abstract.cfm?URI=CLEO: S and I-2011-CThQ4
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