High-resolution integrated spectrometers in silicon-oxynitride

Akca, B.I. and Ismail, N. and Sun, F. and Driessen, A. and Wörhoff, K. and Pollnau, M. and Ridder de, R.M. (2011) High-resolution integrated spectrometers in silicon-oxynitride. In: Conference on Lasers and Electro-Optics, CLEO 2011, 1-6 May 2011, Baltimore, Maryland, USA.

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Abstract:	Arrayed waveguide grating spectrometers operating around 800 nm and 1300 nm are demonstrated, with the highest resolution (0.16 nm) and largest free spectral range (77 nm) achieved in silicon-oxynitride technology to date.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 Optical Society of America
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/77374
Official URL:	http://www.opticsinfobase.org/abstract.cfm?URI=CLEO: S and I-2011-JWA65
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