A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material
Blanco Carballo, V.M. and Fransen, M. and Graaf, H. van der and Lu, J. and Schmitz, J. (2011) A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material. Nuclear instruments and methods in physics research. Section A: Accelerators, spectrometers, detectors and associated equipment, 629 (1). pp. 118-122. ISSN 0168-9002
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|Abstract:||We present a new Micro Pattern Gaseous Detector (MPGD) fabricated with non polymeric materials. The device structure is similar to a Microbulk Microme gas design, consisting of a punctured metalgrid supported by a continuous perforate dinsulating structure.
In this detector, the supporting structure is made out of silicon oxide. Devices were tested in He/iC4H10 (80/20) and Ar/iC4H10 (80/20)gas mixtures under 55Fe irradiation. Gas gain of 20,000 and energy resolution below 13%FWHM were achieved. The CMOS compatibility of the fabrication process has been studied in Timepix chips as well as individual 0.13-mm technology CMOS transistors. Complete detectors have been fabricated on top of Timepix chips. In an Ar/iC4H10 (80/20) gas mixture 55Fe decay events were recorded operating the Timepix chip in 2D readout mode.
|Copyright:||© 2011 Elsevier|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/77320|
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