A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material

Blanco Carballo, V.M. and Fransen, M. and Graaf van der, H. and Lu, J. and Schmitz, J. (2011) A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 629 (1). pp. 118-122. ISSN 0168-9002

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Abstract:	We present a new Micro Pattern Gaseous Detector (MPGD) fabricated with non polymeric materials. The device structure is similar to a Microbulk Microme gas design, consisting of a punctured metalgrid supported by a continuous perforate dinsulating structure. In this detector, the supporting structure is made out of silicon oxide. Devices were tested in He/iC4H10 (80/20) and Ar/iC4H10 (80/20)gas mixtures under 55Fe irradiation. Gas gain of 20,000 and energy resolution below 13%FWHM were achieved. The CMOS compatibility of the fabrication process has been studied in Timepix chips as well as individual 0.13-mm technology CMOS transistors. Complete detectors have been fabricated on top of Timepix chips. In an Ar/iC4H10 (80/20) gas mixture 55Fe decay events were recorded operating the Timepix chip in 2D readout mode.
Item Type:	Article
Copyright:	© 2011 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/77320
Official URL:	http://dx.doi.org/10.1016/j.nima.2010.10.143
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