A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material

Share/Save/Bookmark

Blanco Carballo, V.M. and Fransen, M. and Graaf, H. van der and Lu, J. and Schmitz, J. (2011) A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 629 (1). pp. 118-122. ISSN 0168-9002

[img] PDF
Restricted to UT campus only
: Request a copy
669kB
Abstract:We present a new Micro Pattern Gaseous Detector (MPGD) fabricated with non polymeric materials. The device structure is similar to a Microbulk Microme gas design, consisting of a punctured metalgrid supported by a continuous perforate dinsulating structure.
In this detector, the supporting structure is made out of silicon oxide. Devices were tested in He/iC4H10 (80/20) and Ar/iC4H10 (80/20)gas mixtures under 55Fe irradiation. Gas gain of 20,000 and energy resolution below 13%FWHM were achieved. The CMOS compatibility of the fabrication process has been studied in Timepix chips as well as individual 0.13-mm technology CMOS transistors. Complete detectors have been fabricated on top of Timepix chips. In an Ar/iC4H10 (80/20) gas mixture 55Fe decay events were recorded operating the Timepix chip in 2D readout mode.
Item Type:Article
Copyright:© 2011 Elsevier
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/77320
Official URL:http://dx.doi.org/10.1016/j.nima.2010.10.143
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page