Switchable capacitor and method of making the same

Share/Save/Bookmark

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2006) Switchable capacitor and method of making the same. Patent.

[img]
Preview
PDF
2859Kb
Abstract:A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.
Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/76933
Official URL:http://worldwide.espacenet.com/publicationDetails/originalDocument?FT=D&date=20060221&DB=EPODOC&locale=en_EP&CC=US&NR=7002439B2&KC=B2
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page