Poor man's nanofabrication

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Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam .

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Abstract:The goal of this lecture is to familiarize the listener with most of
the established off-the-road techniques to create nanostructures using
university-friendly equipment; the poor man’s nanotechnology.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/76605
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