Capillarity effect in silicon based nanochannels


Tas, Niels and Haneveld, Jeroen and Jansen, Henri and Brunets, Nataliya and Honschoten, Joost van (2009) Capillarity effect in silicon based nanochannels. In: Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam.

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Abstract:Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of this small size is a strong effect.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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