Capillarity effect in silicon based nanochannels
Tas, Niels and Haneveld, Jeroen and Jansen, Henri and Brunets, Nataliya and Honschoten van, Joost (2009) Capillarity effect in silicon based nanochannels. In: Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam.
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| Abstract: | Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of this small size is a strong effect. |
| Item Type: | Conference or Workshop Item |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/76540 |
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