Flowmeter

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Lammerink, Theodorus Simon Josef and Dijkstra, Marcel and Haneveld, Jeroen and Wiegerink, Remco John (2009) Flowmeter. Patent.

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Abstract:A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/76522
Official URL:http://v3.espacenet.com/publicationDetails/biblio?CC=US&NR=2009308177A1&KC=A1&FT=D&date=20091217&DB=EPODOC&locale=en_EP
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