Flowmeter with silicon flow tube

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Abstract:	A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
Item Type:	Patent
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/76520
Official URL:	http://v3.espacenet.com/publicationDetails/biblio?CC=NL&NR=1034905C2&KC=C2&FT=D&date=20090714&DB=EPODOC&locale=en_EP
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