Testing of MEMS-based microsystems

Kerkhoff, Hans G. (2005) Testing of MEMS-based microsystems. In: 10th IEEE European Test Symposium, ETS 2005, 22-25 May 2005, Talinn, Estonia.

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Abstract:	The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.
Item Type:	Conference or Workshop Item
Copyright:	© 2005 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Computer Architecture for Embedded Systems (CAES)
Link to this item:	http://purl.utwente.nl/publications/76473
Official URL:	http://dx.doi.org/10.1109/ETS.2005.40
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