Testing of MEMS-based microsystems


Kerkhoff, Hans G. (2005) Testing of MEMS-based microsystems. In: 10th IEEE European Test Symposium, ETS 2005, 22-25 May 2005, Talinn, Estonia (pp. pp. 223-228).

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Abstract:The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/76473
Official URL:https://doi.org/10.1109/ETS.2005.40
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