Micromechanically tuned ring resonator in silicon on insulator


Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Dijkstra, Meindert and Boer, Meint J. de and Berenschot, Erwin and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder, René M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics Letters, 36 (7). pp. 1047-1049. ISSN 0146-9592

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Abstract:We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
Item Type:Article
Copyright:© 2011 Optical Society of America
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/76449
Official URL:https://doi.org/10.1364/OL.36.001047
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