Mask materials in powderblasting

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Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France.

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Abstract:Powderblasting has the opportunity to become a standard technology in micromachining. To machine small details with powderbalsting, it is necessary to use a suiabled mask. In this paper four mask types ares examined. BF400 resist foil is most suitable for standard use in powderblasting for reason of simplicity. A simples metal plate can be used with less accurate dimensions (> 1mm) but having the advantage of being reusable. Electroplated copper has the opportunity to be a suitable mask for machining lateral dimentions of 50 um and less. These mask materials show that there are manu ways of using powderblasting as a microtechnology.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/76224
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