A survey on the reactive ion etching of silicon in microtechnology

Jansen, Henri and Gardeniers, Han and Fluitman, Jan (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark.

Preview

PDF
22Mb

Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/76168
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 114111