A survey on the reactive ion etching of silicon in microtechnology


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Jansen, Henri and Gardeniers, Han and Fluitman, Jan (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/76168
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