Optimization of a capacitive MEMS power sensor for radio frequency applications

Fernandez, Luis J. and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: MicroMechanics Europe Workshop, MME, September 5 - 7, 2004, Leuven, Belgium.

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Abstract:	A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/76165
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