Novel rf power sensor based on capacitive MEMS technology


Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 41-44).

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Abstract:We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
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Metis ID: 212825