A micromirror for optical projection displays


Brookhuis, R.A. and Boer, M.J. de and Dijkstra, M. and Kuijpers, A.A. and Lierop, D. van and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

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Abstract:In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/76084
Conference URL:http://www.utwente.nl/ewi/mme2010/
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