A micromirror for optical projection displays

Brookhuis, R.A. and Boer de, M.J. and Dijkstra, M. and Kuijpers, A.A. and Lierop van, D. and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

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Abstract:	In this paper we present a tilting micro mirror with a large mirror surface of up to 2.5 mm x 1.0 mm and a large rotation angle of +/- 10° as needed for optical projection displays. The mirror is driven by vertical comb-drive actuators which are realized by a combination of deep reactive ion etching (DRIE) and a buried mask to provide selfalignment of the stator and rotor fingers in a silicon on insulator (SOI) wafer. Measurement results are shown for various realized mirror designs.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/76084
Conference URL:	http://www.utwente.nl/ewi/mme2010/
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