Nanometer resolution TEM sample manipulator for rotational and translational positioning

Jong de, B.R. and Brouwer, D.M. and Jansen, H.V. and Boer de, M.J. and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain.

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Abstract:	The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.
Item Type:	Conference or Workshop Item
Faculty:	Engineering Technology (CTW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mechanical Automation and Mechatronics Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/76055
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