Nanometer resolution TEM sample manipulator for rotational and translational positioning


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Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain.

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Abstract:The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.
Item Type:Conference or Workshop Item
Additional information:This work has been made possible by the financial support of the Dutch ministry of economic affairs program IOP Precision Technology.
Faculty:
Engineering Technology (CTW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/76055
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