AIN thin film unimorph piezoelectric actuators on polysilicon microbridges


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Saravanan, S. and Dijkstra, M. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

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Abstract:We present a surface micromachining process to fabricate AlN piezoelectric microstructures. The fabrication process utilizes Si02 sacrificial layer etching with Polysilicon as a structural layer. The significance of the process is that the polysilicon layer is used as a structural as weIl as a bottom electrode layer. A thin layer of Cr is used as a mask layer to etch both the AIN and polysilicon layers, while acting as a top electrode. The fabricated clamped-clamped beam microbridges show compressive stress. Preliminary results using phase-shift interferometry measurements show displacements of 8.3nmN on a typical microbridge with dimensions 385 x 50 /-lm.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/76040
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