MEMS based hair flow-sensors as model systems for acoustic perception studies

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Krijnen, Gijs J.M. and Dijkstra, M. and Baar, J.J. van and Boer, J.H. de and Lammerink, T.S.J. and Wiegerink, R.J. (2005) MEMS based hair flow-sensors as model systems for acoustic perception studies. In: International Conference on Bio-Nano-Information Fusion, 20-22 July 2005, Marina del Rey, CA, USA.

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Abstract:Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75970
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