MEMS based hair flow-sensors as model systems for acoustic perception studies


Krijnen, Gijs J.M. and Dijkstra, M. and Baar, J.J. van and Boer, J.H. de and Lammerink, T.S.J. and Wiegerink, R.J. (2005) MEMS based hair flow-sensors as model systems for acoustic perception studies. In: International Conference on Bio-Nano-Information Fusion, 20-22 July 2005, Marina del Rey, CA, USA.

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Abstract:Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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