Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems
Lu, J. and Liu, W. and Werf van der, C.H.M. and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: IEEE International Electron Devices Meeting, IEDM 2010, 6-8 December 2010, San Francisco, CA, USA.
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| Abstract: | Two types of solar cells are successfully grown on chips from two CMOS generations. The efficiency of amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium-gallium-selenide (CIGS) cells 7.1%. CMOS functionality is unaffected. The main integration issues: adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress can be resolved while maintaining standard photovoltaic processing. |
| Item Type: | Conference or Workshop Item |
| Copyright: | © 2010 IEEE |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/75943 |
| Official URL: | http://dx.doi.org/10.1109/IEDM.2010.5703457 |
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