Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems


Lu, J. and Liu, W. and Werf, C.H.M. van der and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: IEEE International Electron Devices Meeting, IEDM 2010, 6-8 December 2010, San Francisco, CA, USA (pp. 31.3.1.-31.3.4).

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Abstract:Two types of solar cells are successfully grown on chips from two CMOS generations. The efficiency of amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium-gallium-selenide (CIGS) cells 7.1%. CMOS functionality is unaffected. The main integration issues: adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress can be resolved while maintaining standard photovoltaic processing.
Item Type:Conference or Workshop Item
Copyright:© 2010 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/75943
Official URL:https://doi.org/10.1109/IEDM.2010.5703457
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