Mechano-optical switching in a mems integrated photonic crystal slab waveguide


Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 9-12).

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Abstract:A photonic crystal slab waveguide (PhC-WG) with an
integrated MEMS bimorph cantilever actuator has been
successfully fabricated using deep UV lithography and
surface micromaching techniques. The cantilever is
equipped with tips that are self-aligned with respect to the
holes of the PhC-WG such that on electrostatic actuation,
with modest voltages of less than 10 V, these tips move into
the holes. This provides electro-opto-mechanical
modulation of light-transmission, up to 80%, for interaction
lengths as short as 10 μm. The device is monolithically
integrated and designed to operate in the C-band of the
telecommunication wavelengths.
Item Type:Conference or Workshop Item
Copyright:© 2011 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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