Mechano-optical switching in a mems integrated photonic crystal slab waveguide

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and Boer de, M.J. and Ridder de, R.M. and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico.

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Abstract:	A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.
Item Type:	Conference or Workshop Item
Copyright:	© 2011 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/75916
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