Development of an array of transition edge sensors for application in X-ray astronomy

Bruijn, Marcel P. and Baars, Norman H.R. and Bergmann Tiest, Wouter M. and Germeau, Alexander and Hoevers, Henk F.C. and Korte de, Piet A.J. and Mels, Wim A. and Ridder, Marcel L. and Krouwer, Eric and Baar van, John J. and Wiegerink, Remco J. (2004) Development of an array of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 520 (1-3). pp. 443-445. ISSN 0168-9002

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Abstract:	We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.
Item Type:	Article
Copyright:	© 2004 Elsevier
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/75737
Official URL:	http://dx.doi.org/10.1016/j.nima.2003.11.359
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